State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, People's Republic of China.
IET Nanobiotechnol. 2011 Dec;5(4):108-13. doi: 10.1049/iet-nbt.2011.0007.
A silicon nanochannel system with integrated transverse electrodes was designed and fabricated by combining micro-electro-mechanical systems (MEMS) micromachining and atomic force microscopy (AFM)-based nanolithography. The fabrication process began with the patterning of microscale reservoirs and electrodes on an oxidised silicon chip using conventional MEMS techniques. A nanochannel, approximately 30 [micro sign]m long with a small semi-circular cross-sectional area of 20 nm × 200 nm, was then mechanically machined on the oxide surface between the micro reservoirs by applying AFM nanolithography with an all-diamond probe. Anodic bonding was used to seal off the nanochannel with a matching Pyrex cover. Continuous flow in the nanochannel was verified by pressurising a solution of fluorescein isothiocyanate in ethanol through the nanochannel in a vacuum chamber. It was further demonstrated by translocating negatively charged nanobeads (diameter approximately 20 nm) through the nanochannel by using an external DC electric field. The passage of the nanobeads caused a sharp increase in the transverse electrical conductivity of the nanochannel.
设计并制作了一种带有集成横向电极的硅纳米通道系统,该系统通过结合微机电系统(MEMS)微加工和基于原子力显微镜(AFM)的纳米光刻技术来实现。该制造过程首先使用传统的 MEMS 技术在氧化硅芯片上对微尺度储液器和电极进行图案化。然后,通过使用具有全金刚石探针的 AFM 纳米光刻技术,在微储液器之间的氧化物表面上机械加工出长约 30 [micro sign]m 且具有 20nm×200nm 小半圆形横截面的纳米通道。通过在真空中用乙醇中的荧光素异硫氰酸酯溶液加压通过纳米通道,验证了纳米通道中的连续流动。进一步通过施加外部直流电场将带负电的纳米珠(直径约 20nm)穿过纳米通道来证明。纳米珠的通过导致纳米通道的横向电导率急剧增加。