Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu 30013, Taiwan.
Sensors (Basel). 2011;11(8):7763-72. doi: 10.3390/s110807763. Epub 2011 Aug 8.
The goal of this research was to develop a chemical gas sensing device based on single-walled carbon nanotube (SWCNT) networks. The SWCNT networks are synthesized on Al(2)O(3)-deposted SiO(2)/Si substrates with 10 nm-thick Fe as the catalyst precursor layer using microwave plasma chemical vapor deposition (MPCVD). The development of interconnected SWCNT networks can be exploited to recognize the identities of different chemical gases by the strength of their particular surface adsorptive and desorptive responses to various types of chemical vapors. The physical responses on the surface of the SWCNT networks cause superficial changes in the electric charge that can be converted into electronic signals for identification. In this study, we tested NO(2) and NH(3) vapors at ppm levels at room temperature with our self-made gas sensing device, which was able to obtain responses to sensitivity changes with a concentration of 10 ppm for NO(2) and 24 ppm for NH(3).
本研究的目的是开发基于单壁碳纳米管 (SWCNT) 网络的化学气体传感装置。SWCNT 网络使用微波等离子体化学气相沉积 (MPCVD) 在沉积有 10nm 厚 Fe 的 Al(2)O(3) -SiO(2)/Si 衬底上合成。通过将相互连接的 SWCNT 网络进行开发，可以通过它们对各种类型的化学蒸气的特定表面吸附和解吸响应的强度来识别不同化学气体的身份。SWCNT 网络表面的物理响应会导致电荷的表面变化，这些变化可以转化为电子信号进行识别。在这项研究中，我们使用自制的气体传感装置在室温下测试了 ppm 级别的 NO(2) 和 NH(3) 蒸气，该装置能够对 10ppm 的 NO(2) 和 24ppm 的 NH(3)浓度的灵敏度变化做出响应。
