Baek Seong-Ho, Noh Bum-Young, Park Il-Kyu, Kim Jae Hyun
Energy Research Division, Daegu Gyeongbuk Institute of Science & Technology (DGIST), 50-1, Sang-Ri, Hyeonpung-Myeon, Dalseong-gun, Daegu, 711-873, South Korea.
Nanoscale Res Lett. 2012 Jan 5;7(1):29. doi: 10.1186/1556-276X-7-29.
In this study, we have fabricated and characterized the silicon [Si] wire solar cells with conformal ZnO nanorod antireflection coating [ARC] grown on a Al-doped ZnO [AZO] seed layer. Vertically aligned Si wire arrays were fabricated by electrochemical etching and, the p-n junction was prepared by spin-on dopant diffusion method. Hydrothermal growth of the ZnO nanorods was followed by AZO film deposition on high aspect ratio Si microwire arrays by atomic layer deposition [ALD]. The introduction of an ALD-deposited AZO film on Si wire arrays not only helps to create the ZnO nanorod arrays, but also has a strong impact on the reduction of surface recombination. The reflectance spectra show that ZnO nanorods were used as an efficient ARC to enhance light absorption by multiple scattering. Also, from the current-voltage results, we found that the combination of the AZO film and ZnO nanorods on Si wire solar cells leads to an increased power conversion efficiency by more than 27% compared to the cells without it.
在本研究中，我们制备并表征了在铝掺杂氧化锌（AZO）籽晶层上生长有共形氧化锌纳米棒抗反射涂层（ARC）的硅（Si）线太阳能电池。通过电化学蚀刻制备垂直排列的硅线阵列，并通过旋涂掺杂剂扩散法制备p-n结。在通过原子层沉积（ALD）在高纵横比的硅微线阵列上沉积AZO薄膜之后，进行氧化锌纳米棒的水热生长。在硅线阵列上引入ALD沉积的AZO薄膜不仅有助于形成氧化锌纳米棒阵列，而且对减少表面复合有很大影响。反射光谱表明，氧化锌纳米棒被用作有效的抗反射涂层，通过多次散射增强光吸收。此外，从电流-电压结果中我们发现，与没有该组合的电池相比，在硅线太阳能电池上使用AZO薄膜和氧化锌纳米棒的组合可使功率转换效率提高超过27%。
