Inorganic Materials Science, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands.
Langmuir. 2012 Feb 7;28(5):3045-52. doi: 10.1021/la204437r. Epub 2012 Jan 20.
A simple methodology to fabricate micrometer- and nanometer-scale patterned surfaces with multiple chemical functionalities is presented. Patterns with lateral dimensions down to 110 nm were made. The fabrication process involves multistep gas-phase patterning of amine, thiol, alkyl, and fluorinated alkyl-functional organosilane molecules using PDMS molds as shadow masks. Also, a combination process of channel diffused plasma etching of organosilane molecular thin films in combination with masked gas-phase deposition to fabricate multilength scale, multifunctional surfaces is demonstrated.
提出了一种制造具有多种化学功能的微米级和纳米级图案表面的简单方法。已经制作出了尺寸低至 110nm 的图案。该制造工艺涉及使用 PDMS 模具作为阴影掩模，对胺、硫醇、烷基和氟化烷基官能有机硅烷分子进行多步气相图案化。此外，还展示了一种组合工艺，即将有机硅烷分子薄膜进行通道扩散等离子体刻蚀与掩蔽气相沉积相结合，以制造多长度尺度、多功能表面。
