Kavli Nanoscience Institute and Department of Physics, Caltech, Pasadena, CA, USA.
Nano Lett. 2012 Mar 14;12(3):1269-74. doi: 10.1021/nl2037479. Epub 2012 Feb 10.
We have developed arrays of nanomechanical systems (NEMS) by large-scale integration, comprising thousands of individual nanoresonators with densities of up to 6 million NEMS per square centimeter. The individual NEMS devices are electrically coupled using a combined series-parallel configuration that is extremely robust with respect to lithographical defects and mechanical or electrostatic-discharge damage. Given the large number of connected nanoresonators, the arrays are able to handle extremely high input powers (>1 W per array, corresponding to <1 mW per nanoresonator) without excessive heating or deterioration of resonance response. We demonstrate the utility of integrated NEMS arrays as high-performance chemical vapor sensors, detecting a part-per-billion concentration of a chemical warfare simulant within only a 2 s exposure period.
我们通过大规模集成开发了纳米机械系统（NEMS）阵列，其中包含数千个单独的纳米谐振器，其密度高达每平方厘米 600 万个 NEMS。使用串联-并联组合配置将各个 NEMS 器件电耦合，该配置在光刻缺陷和机械或静电放电损坏方面具有极高的稳健性。由于连接的纳米谐振器数量众多，因此这些阵列能够处理极高的输入功率（每个阵列超过 1 W，对应于每个纳米谐振器 <1 mW），而不会出现过度加热或共振响应恶化的情况。我们展示了集成 NEMS 阵列作为高性能化学气相传感器的实用性，仅在 2 秒的暴露时间内即可检测到化学战剂模拟物的十亿分之一浓度。
