Applied Physics Department, The Hebrew University, Jerusalem 91904, Israel.
Sensors (Basel). 2011;11(11):10624-37. doi: 10.3390/s111110624. Epub 2011 Nov 8.
In recent years, epitaxial growth of self-assembled quantum dots has offered a way to incorporate new properties into existing solid state devices. Although the droplet heteroepitaxy method is relatively complex, it is quite relaxed with respect to the material combinations that can be used. This offers great flexibility in the systems that can be achieved. In this paper we review the structure and composition of a number of quantum dot systems grown by the droplet heteroepitaxy method, emphasizing the insights that these experiments provide with respect to the growth process. Detailed structural and composition information has been obtained using surface X-ray diffraction analyzed by the COBRA phase retrieval method. A number of interesting phenomena have been observed: penetration of the dots into the substrate ("nano-drilling") is often encountered; interdiffusion and intermixing already start when the group III droplets are deposited, and structure and composition may be very different from the one initially intended.
近年来,自组装量子点的外延生长为将新特性引入现有固态器件提供了一种方法。尽管液滴异质外延法相对复杂,但对于可以使用的材料组合却相当宽松。这为可以实现的系统提供了很大的灵活性。在本文中,我们综述了通过液滴异质外延法生长的一些量子点系统的结构和组成,重点介绍了这些实验对生长过程的见解。通过 COBRA 相重构方法分析表面 X 射线衍射获得了详细的结构和组成信息。观察到了一些有趣的现象:点经常穿透到衬底中(“纳米钻孔”);当 III 族液滴沉积时,已经开始发生互扩散和混合,并且结构和组成可能与最初预期的非常不同。