Department of Electrical Engineering, Yale University, New Haven, Connecticut 06511, USA.
Nano Lett. 2012 May 9;12(5):2299-305. doi: 10.1021/nl300142t. Epub 2012 Apr 6.
We demonstrate a new optomechanical device system which allows highly efficient transduction of femtogram nanobeam resonators. Doubly clamped nanomechanical resonators with mass as small as 25 fg are embedded in a high-finesse two-dimensional photonic crystal nanocavity. Optical transduction of the fundamental flexural mode around 1 GHz was performed at room temperature and ambient conditions, with an observed displacement sensitivity of 0.94 fm/Hz(1/2). Comparison of measurements from symmetric and asymmetric double-beam devices reveals hybridization of the mechanical modes where the structural symmetry is shown to be the key to obtain a high mechanical quality factor. Our novel configuration opens the way for a new category of "NEMS-in-cavity" devices based on optomechanical interaction at the nanoscale.
我们展示了一种新的光机械装置系统,该系统能够高效地转换飞克量级的纳米梁谐振器。质量小至 25 飞克的双夹纳米机械谐振器嵌入在高精细二维光子晶体纳米腔中。在室温及环境条件下,对约 1GHz 的基本弯曲模式进行了光传输,观察到的位移灵敏度为 0.94fm/Hz(1/2)。对称和非对称双光束器件的测量结果比较表明,机械模式发生了杂化,结构对称性被证明是获得高机械品质因数的关键。我们的新型结构为基于纳米尺度光机械相互作用的新型“腔内 NEMS”器件开辟了道路。