Lim Jongwoo, Jeong Bong Yong, Yoon Ho Gyu, Lee Sung-Nam, Kim Jihoon
Future Convergence Ceramic Division, Korea Institute of Ceramic Engineering and Technology, Seoul 153-801, Korea.
J Nanosci Nanotechnol. 2012 Feb;12(2):1675-8. doi: 10.1166/jnn.2012.4622.
Antimony-doped Tin oxide (ATO) films have been prepared by inkjet-printing method using ATO nanoparticle inks. The electrical and optical properties of the ATO films were investigated in order to understand the effects of rapid thermal annealing (RTA) temperatures. The decrease in the sheet resistance and resistivity of the inkjet-printed ATO films was observed as the annealing temperature increased. The film annealed at 700 degrees C showed the sheet resistance of 1.7 x 10(3) Omega/sq with the film thickness of 350 nm. The optical transmittance of the films remained constant regardless of their annealing temperatures. In order to further reduce the sheet resistance of the films as well as the annealing temperature, Ag-grid was printed in between two layers of inkjet-printed ATO. With 1.5 mm Ag line spacing, the Ag-grid embedded ATO film showed the sheet resistance of 25.6 Omega/sq after RTA at 300 degrees C.
采用锑掺杂氧化锡（ATO）纳米颗粒墨水，通过喷墨印刷法制备了ATO薄膜。为了解快速热退火（RTA）温度的影响，对ATO薄膜的电学和光学性能进行了研究。随着退火温度的升高，观察到喷墨印刷的ATO薄膜的表面电阻和电阻率降低。在700℃退火的薄膜，膜厚为350nm时，表面电阻为1.7×10³Ω/sq。薄膜的光学透过率与退火温度无关，保持恒定。为了进一步降低薄膜的表面电阻以及退火温度，在两层喷墨印刷的ATO之间印刷了银栅。银线间距为1.5mm时，银栅嵌入的ATO薄膜在300℃进行RTA后，表面电阻为25.6Ω/sq。
