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用于逻辑晶体管和互补反相器的层状材料垂直堆叠的多异质结构。

Vertically stacked multi-heterostructures of layered materials for logic transistors and complementary inverters.

机构信息

Department of Chemistry and Biochemistry, University of California, Los Angeles, California 90095, USA.

出版信息

Nat Mater. 2013 Mar;12(3):246-52. doi: 10.1038/nmat3518. Epub 2012 Dec 16.

Abstract

Graphene has attracted considerable interest for future electronics, but the absence of a bandgap limits its direct applicability in transistors and logic devices. Recently, other layered materials such as molybdenum disulphide (MoS(2)) have been investigated to address this challenge. Here, we report the vertical integration of multi-heterostructures of layered materials for the fabrication of a new generation of vertical field-effect transistors (VFETs) with a room temperature on-off ratio > 10(3) and a high current density of up to 5,000 A cm(-2). An n-channel VFET is created by sandwiching few-layer MoS(2) as the semiconducting channel between a monolayer graphene sheet and a metal thin film. This approach offers a general strategy for the vertical integration of p- and n-channel transistors for high-performance logic applications. As an example, we demonstrate a complementary inverter with a larger-than-unity voltage gain by vertically stacking graphene, Bi(2)Sr(2)Co(2)O(8) (p-channel), graphene, MoS(2) (n-channel) and a metal thin film in sequence. The ability to simultaneously achieve a high on-off ratio, a high current density and a logic function in such vertically stacked multi-heterostructures can open up possibilities for three-dimensional integration in future electronics.

摘要

石墨烯因其在未来电子产品中的应用前景而备受关注,但由于缺乏带隙,其在晶体管和逻辑器件中的直接应用受到限制。最近,人们研究了其他层状材料,如二硫化钼 (MoS(2)),以解决这一挑战。在这里,我们报告了层状材料的多异质结构的垂直集成,用于制造新一代具有室温开/关比>10(3)和高达 5000 A cm(-2)的高电流密度的垂直场效应晶体管 (VFET)。n 沟道 VFET 是通过将几层 MoS(2)作为半导体沟道夹在单层石墨烯片和金属薄膜之间而制成的。这种方法为高性能逻辑应用中 p 沟道和 n 沟道晶体管的垂直集成提供了一种通用策略。例如,我们通过垂直堆叠石墨烯、Bi(2)Sr(2)Co(2)O(8) (p 沟道)、石墨烯、MoS(2) (n 沟道)和金属薄膜,展示了一个具有大于单位电压增益的互补反相器。这种垂直堆叠多异质结构中能够同时实现高开/关比、高电流密度和逻辑功能的能力为未来电子产品的三维集成开辟了可能性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6a2f/4249642/4a1695edf37e/nihms419957f1.jpg

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