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单层 MoS2 晶体管。

Single-layer MoS2 transistors.

机构信息

Electrical Engineering Institute, Ecole Polytechnique Federale de Lausanne, CH-1015 Lausanne, Switzerland.

出版信息

Nat Nanotechnol. 2011 Mar;6(3):147-50. doi: 10.1038/nnano.2010.279. Epub 2011 Jan 30.

DOI:10.1038/nnano.2010.279
PMID:21278752
Abstract

Two-dimensional materials are attractive for use in next-generation nanoelectronic devices because, compared to one-dimensional materials, it is relatively easy to fabricate complex structures from them. The most widely studied two-dimensional material is graphene, both because of its rich physics and its high mobility. However, pristine graphene does not have a bandgap, a property that is essential for many applications, including transistors. Engineering a graphene bandgap increases fabrication complexity and either reduces mobilities to the level of strained silicon films or requires high voltages. Although single layers of MoS(2) have a large intrinsic bandgap of 1.8 eV (ref. 16), previously reported mobilities in the 0.5-3 cm(2) V(-1) s(-1) range are too low for practical devices. Here, we use a halfnium oxide gate dielectric to demonstrate a room-temperature single-layer MoS(2) mobility of at least 200 cm(2) V(-1) s(-1), similar to that of graphene nanoribbons, and demonstrate transistors with room-temperature current on/off ratios of 1 × 10(8) and ultralow standby power dissipation. Because monolayer MoS(2) has a direct bandgap, it can be used to construct interband tunnel FETs, which offer lower power consumption than classical transistors. Monolayer MoS(2) could also complement graphene in applications that require thin transparent semiconductors, such as optoelectronics and energy harvesting.

摘要

二维材料因其易于从一维材料中构建复杂结构而在下一代纳米电子器件中具有吸引力。最广泛研究的二维材料是石墨烯,这既是因为其丰富的物理性质,也是因为其高迁移率。然而,原始石墨烯没有带隙,这是许多应用所必需的,包括晶体管。设计石墨烯带隙会增加制造复杂性,要么降低迁移率至应变硅膜的水平,要么需要高电压。虽然单层 MoS(2)具有 1.8 eV 的大固有带隙(参考文献 16),但以前报道的在 0.5-3 cm(2) V(-1) s(-1)范围内的迁移率对于实际器件来说太低了。在这里,我们使用半氮氧化物栅介质来证明室温下单层 MoS(2)的迁移率至少为 200 cm(2) V(-1) s(-1),类似于石墨烯纳米带的迁移率,并展示了室温下电流比为 1 × 10(8)和超低待机功耗的晶体管。由于单层 MoS(2)具有直接带隙,它可用于构建能带间隧道 FET,其功耗低于经典晶体管。单层 MoS(2)也可以在需要薄透明半导体的应用中与石墨烯互补,例如光电和能量收集。

相似文献

1
Single-layer MoS2 transistors.单层 MoS2 晶体管。
Nat Nanotechnol. 2011 Mar;6(3):147-50. doi: 10.1038/nnano.2010.279. Epub 2011 Jan 30.
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Nanoelectronics: Flat transistors get off the ground.纳米电子学:平面晶体管取得进展。
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Integrated circuits based on bilayer MoS₂ transistors.基于双层 MoS₂ 晶体管的集成电路。
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High-kappa oxide nanoribbons as gate dielectrics for high mobility top-gated graphene transistors.高κ氧化物纳米带作为栅介质的高迁移率顶栅石墨烯晶体管。
Proc Natl Acad Sci U S A. 2010 Apr 13;107(15):6711-5. doi: 10.1073/pnas.0914117107. Epub 2010 Mar 22.
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Measurement of mobility in dual-gated MoS₂ transistors.双栅极二硫化钼晶体管迁移率的测量
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Reply to 'Measurement of mobility in dual-gated MoS₂ transistors'.对“双栅极二硫化钼晶体管迁移率的测量”的回复
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Integrated circuits and logic operations based on single-layer MoS2.基于单层 MoS2 的集成电路和逻辑运算。
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Laser-thinning of MoS₂: on demand generation of a single-layer semiconductor.激光减薄 MoS₂:按需生成单层半导体。
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Breakdown of high-performance monolayer MoS2 transistors.高性能单层 MoS2 晶体管的故障分析。
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本文引用的文献

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