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基于双层 MoS₂ 晶体管的集成电路。

Integrated circuits based on bilayer MoS₂ transistors.

机构信息

Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, United States.

出版信息

Nano Lett. 2012 Sep 12;12(9):4674-80. doi: 10.1021/nl302015v. Epub 2012 Aug 10.

Abstract

Two-dimensional (2D) materials, such as molybdenum disulfide (MoS(2)), have been shown to exhibit excellent electrical and optical properties. The semiconducting nature of MoS(2) allows it to overcome the shortcomings of zero-bandgap graphene, while still sharing many of graphene's advantages for electronic and optoelectronic applications. Discrete electronic and optoelectronic components, such as field-effect transistors, sensors, and photodetectors made from few-layer MoS(2) show promising performance as potential substitute of Si in conventional electronics and of organic and amorphous Si semiconductors in ubiquitous systems and display applications. An important next step is the fabrication of fully integrated multistage circuits and logic building blocks on MoS(2) to demonstrate its capability for complex digital logic and high-frequency ac applications. This paper demonstrates an inverter, a NAND gate, a static random access memory, and a five-stage ring oscillator based on a direct-coupled transistor logic technology. The circuits comprise between 2 to 12 transistors seamlessly integrated side-by-side on a single sheet of bilayer MoS(2). Both enhancement-mode and depletion-mode transistors were fabricated thanks to the use of gate metals with different work functions.

摘要

二维(2D)材料,如二硫化钼(MoS(2)),已被证明具有优异的电学和光学性能。MoS(2)的半导体性质使其克服了零带隙石墨烯的缺点,同时仍然具有许多用于电子和光电子应用的石墨烯的优势。由少层 MoS(2)制成的离散电子和光电子组件,如场效应晶体管、传感器和光电探测器,作为传统电子学中 Si 的潜在替代品,以及在无处不在的系统和显示应用中作为有机和非晶硅半导体的替代品,表现出了很有前途的性能。下一步的重要工作是在 MoS(2)上制造完全集成的多级电路和逻辑模块,以证明其在复杂数字逻辑和高频交流应用中的能力。本文展示了基于直接耦合晶体管逻辑技术的反相器、与非门、静态随机存取存储器和五阶环形振荡器。这些电路由 2 到 12 个晶体管组成,无缝地并排集成在单层双层 MoS(2)上。由于使用了功函数不同的栅极金属,因此可以制造增强型和耗尽型晶体管。

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