Laboratoire De Physique Des Interfaces Et Des Couches Minces, Centre National De La Recherche Scientifique-Ecole Polytechnique, 91228 Palaiseau, France.
Appl Spectrosc. 2013 Jan;67(1):1-21. doi: 10.1366/12-06883.
This article provides a brief overview of both established and novel ellipsometry techniques, as well as their applications. Ellipsometry is an indirect optical technique, in that information about the physical properties of a sample is obtained through modeling analysis. Standard ellipsometry is typically used to characterize optically isotropic bulk and/or layered materials. More advanced techniques such as Mueller ellipsometry, also known as polarimetry in the literature, are necessary for the complete and accurate characterization of anisotropic and/or depolarizing samples that occur in many instances, both in research and in real-life activities. In this article, we cover three main subject areas: Basic theory of polarization, standard ellipsometry, and Mueller ellipsometry. The first section is devoted to a short, pedagogical introduction of the formalisms used to describe light polarization. The second section is devoted to standard ellipsometry. The focus is on the experimental aspects, including both pros and cons of commercially available instruments. The third section is devoted to recent advances in Mueller ellipsometry. Application examples are provided in the second and third sections to illustrate how each technique works.
本文简要概述了已建立和新颖的椭圆偏振技术及其应用。椭圆偏振是一种间接光学技术，通过建模分析可以获得有关样品物理性质的信息。标准椭圆偏振术通常用于表征各向同性块状和/或层状材料。更先进的技术，如穆勒椭圆偏振术（文献中也称为偏振测量术），对于完全准确地表征各向异性和/或退偏样品是必要的，这些样品在许多情况下都会出现，无论是在研究中还是在实际活动中。在本文中，我们涵盖了三个主要主题领域：偏振的基本理论、标准椭圆偏振术和穆勒椭圆偏振术。第一节专门介绍了用于描述光偏振的形式体系的简短教学介绍。第二节专门介绍了标准椭圆偏振术。重点是实验方面，包括商业可用仪器的优缺点。第三节专门介绍了穆勒椭圆偏振术的最新进展。在第二节和第三节中提供了应用示例，以说明每种技术的工作原理。
