Kim Taejoong, Kim Sang Hoon, Do DukHo, Yoo Hongki, Gweon DaeGab
Nanoscope Systems, Inc, Daejeon 305-509, South Korea.
Opt Express. 2013 Mar 11;21(5):6286-94. doi: 10.1364/OE.21.006286.
Chromatic confocal microscopy (CCM) is a promising technology that enables high-speed three-dimensional surface profiling without mechanical depth scanning. However, the spectrometer, which measures depth information encoded by axial color, limits the speed of three-dimensional imaging. We present a novel method for chromatic confocal microscopy with transmittance detection. Depth information can be instantaneously obtained by the ratio of intensity signals from two photomultiplier tubes by detecting a peak wavelength using transmittance of a color filter. This non-destructive and high-speed surface profiling method might be useful in many fields, including the semiconductor and flat panel display industries, and in material science.
彩色共聚焦显微镜（CCM）是一项很有前景的技术，它能够在无需机械深度扫描的情况下实现高速三维表面轮廓测量。然而，用于测量由轴向颜色编码的深度信息的光谱仪限制了三维成像的速度。我们提出了一种具有透射率检测功能的彩色共聚焦显微镜新方法。通过使用滤色片的透射率检测峰值波长，由两个光电倍增管的强度信号之比可即时获取深度信息。这种无损且高速的表面轮廓测量方法可能在包括半导体和平板显示行业以及材料科学在内的许多领域中有用。
