Lubeck J, Beckhoff B, Fliegauf R, Holfelder I, Hönicke P, Müller M, Pollakowski B, Reinhardt F, Weser J
Physikalisch-Technische Bundesanstalt, Berlin, Germany.
Rev Sci Instrum. 2013 Apr;84(4):045106. doi: 10.1063/1.4798299.
A novel ultra-high vacuum instrument for X-ray reflectometry and spectrometry-related techniques for nanoanalytics by means of synchrotron radiation has been constructed and commissioned. This versatile instrument was developed by the Physikalisch-Technische Bundesanstalt, Germany's national metrology institute, and includes a 9-axis manipulator that allows for an independent alignment of the samples with respect to all degrees of freedom. In addition, a rotational and translational movement of several photodiodes as well as a translational movement of an aperture system in and out of the beam is provided. Thus, the new instrument enables various analytical techniques based on energy dispersive X-ray detectors such as reference-free X-ray fluorescence analysis (XRF), total-reflection XRF, grazing-incidence XRF in addition to optional X-ray reflectometry measurements or polarization-dependent X-ray absorption fine structure analyses. With this instrument samples having a size of up to 100 mm × 100 mm can be analyzed with respect to their mass deposition, elemental or spatial composition, or the species in order to probe surface contamination, layer composition and thickness, the depth profile of matrix elements or implants, the species of nanolayers, nanoparticles or buried interfaces as well as the molecular orientation of bonds. Selected applications of this advanced ultra-high vacuum instrument demonstrate both its flexibility and capability.
一台用于纳米分析的新型超高真空仪器已建成并投入使用，该仪器采用同步辐射技术，用于X射线反射测量和与光谱相关的技术。这台多功能仪器由德国国家计量机构物理技术联邦研究所研制，包括一个九轴机械手，可对样品在各个自由度上进行独立对准。此外，还提供了几个光电二极管的旋转和平移运动以及孔径系统在光束中的进出平移运动。因此，这台新仪器能够实现基于能量色散X射线探测器的各种分析技术，如无标样X射线荧光分析（XRF）、全反射XRF、掠入射XRF，此外还可进行可选的X射线反射测量或偏振相关的X射线吸收精细结构分析。使用这台仪器，可以对尺寸达100 mm×100 mm的样品进行质量沉积、元素或空间组成或种类分析，以探测表面污染、层组成和厚度、基体元素或植入物的深度分布、纳米层、纳米颗粒或埋藏界面的种类以及键的分子取向。这台先进的超高真空仪器的一些选定应用展示了其灵活性和能力。
