Department of Mechanical Engineering, University of California, Berkeley, CA 94720-1740, USA.
Small. 2013 Dec 20;9(24):4269-75. doi: 10.1002/smll.201300990. Epub 2013 Jul 11.
General methods utilized in the fabrication of graphene devices involve graphene transferring and subsequent patterning of graphene via multiple wet-chemical processes. In the present study, a laser-induced pattern transfer (LIPT) method is proposed for the transferring and patterning of graphene in a single processing step. Via the direct graphene patterning and simultaneous transferring, the LIPT method greatly reduces the complexity of graphene fabrication while augmenting flexibility in graphene device design. Femtosecond laser ablation under ambient conditions is employed to transfer graphene/PMMA microscale patterns to arbitrary substrates, including a flexible film. Suspended cantilever structures are also demonstrated over a prefabricated trench structure via the single-step method. The feasibility of this method for the fabrication of functional graphene devices is confirmed by measuring the electrical response of a graphene/PMMA device under laser illumination.
用于制造石墨烯器件的一般方法包括通过多种湿化学工艺将石墨烯转移和随后对石墨烯进行图案化。在本研究中，提出了一种激光诱导图案转移（LIPT）方法，用于在单个处理步骤中对石墨烯进行转移和图案化。通过直接对石墨烯进行图案化和同时进行转移，LIPT 方法大大降低了石墨烯制造的复杂性，同时增加了石墨烯器件设计的灵活性。在环境条件下使用飞秒激光烧蚀将石墨烯/PMMA 微尺度图案转移到任意基底上，包括柔性薄膜。还通过单步方法在预制的沟槽结构上展示了悬梁结构。通过测量激光照射下石墨烯/PMMA 器件的电响应，证实了该方法制造功能石墨烯器件的可行性。
