Wang Xu, Grist Samantha, Flueckiger Jonas, Jaeger Nicolas A F, Chrostowski Lukas
Department of Electrical and Computer Engineering, University of British Columbia Vancouver, BC V6T 1Z4, Canada.
Opt Express. 2013 Aug 12;21(16):19029-39. doi: 10.1364/OE.21.019029.
We present the design, fabrication, and characterization of integrated Bragg gratings in silicon-on-insulator slot waveguides. The Bragg gratings are formed with sidewall corrugations, either on the inside or on the outside of the waveguide. We demonstrate resonators implemented using phase-shifted Bragg gratings in slot waveguides, showing quality factors up to 3 × 10(4). Due to the strong optical confinement in the slot, these devices are promising for optical sensing applications. The devices were fabricated using a CMOS-compatible process, facilitating high-volume and low-cost production.
我们展示了绝缘体上硅槽型波导中集成布拉格光栅的设计、制造和特性。布拉格光栅通过在波导内侧或外侧的侧壁波纹形成。我们演示了在槽型波导中使用相移布拉格光栅实现的谐振器，其品质因数高达3×10⁴。由于槽中具有很强的光限制，这些器件在光学传感应用方面很有前景。这些器件采用与CMOS兼容的工艺制造，便于进行大批量低成本生产。
