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表面粗糙度导致 InAs 纳米线电子迁移率下降。

Surface roughness induced electron mobility degradation in InAs nanowires.

机构信息

Department of Physics and Materials Science, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon Tong, Kowloon, Hong Kong.

出版信息

Nanotechnology. 2013 Sep 20;24(37):375202. doi: 10.1088/0957-4484/24/37/375202. Epub 2013 Aug 21.

Abstract

In this work, we present a study of the surface roughness dependent electron mobility in InAs nanowires grown by the nickel-catalyzed chemical vapor deposition method. These nanowires have good crystallinity, well-controlled surface morphology without any surface coating or tapering and an excellent peak field-effect mobility up to 15,000 cm(2) V(-1) s(-1) when configured into back-gated field-effect nanowire transistors. Detailed electrical characterizations reveal that the electron mobility degrades monotonically with increasing surface roughness and diameter scaling, while low-temperature measurements further decouple the effects of surface/interface traps and phonon scattering, highlighting the dominant impact of surface roughness scattering on the electron mobility for miniaturized and surface disordered nanowires. All these factors suggest that careful consideration of nanowire geometries and surface condition is required for designing devices with optimal performance.

摘要

在这项工作中,我们研究了通过镍催化化学气相沉积法生长的 InAs 纳米线中表面粗糙度对电子迁移率的影响。这些纳米线具有良好的结晶性,表面形态可控,无需任何表面涂层或变细,并且在配置为背栅场效应纳米线晶体管时具有高达 15000 cm(2) V(-1) s(-1)的优异峰值场效应迁移率。详细的电特性分析表明,电子迁移率随着表面粗糙度和直径缩放的增加而单调下降,而低温测量进一步分离了表面/界面陷阱和声子散射的影响,突出了表面粗糙度散射对电子迁移率的主要影响对于小型化和表面无序的纳米线。所有这些因素表明,在设计具有最佳性能的器件时,需要仔细考虑纳米线的几何形状和表面条件。

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