Department of Materials Science and Engineering, Beckman Institute, and Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, USA.
Nat Nanotechnol. 2013 Sep;8(9):667-75. doi: 10.1038/nnano.2013.160. Epub 2013 Aug 25.
Self-assembly of block-copolymers provides a route to the fabrication of small (size, <50 nm) and dense (pitch, <100 nm) features with an accuracy that approaches even the demanding specifications for nanomanufacturing set by the semiconductor industry. A key requirement for practical applications, however, is a rapid, high-resolution method for patterning block-copolymers with different molecular weights and compositions across a wafer surface, with complex geometries and diverse feature sizes. Here we demonstrate that an ultrahigh-resolution jet printing technique that exploits electrohydrodynamic effects can pattern large areas with block-copolymers based on poly(styrene-block-methyl methacrylate) with various molecular weights and compositions. The printed geometries have diameters and linewidths in the sub-500 nm range, line edge roughness as small as ∼45 nm, and thickness uniformity and repeatability that can approach molecular length scales (∼2 nm). Upon thermal annealing on bare, or chemically or topographically structured substrates, such printed patterns yield nanodomains of block-copolymers with well-defined sizes, periodicities and morphologies, in overall layouts that span dimensions from the scale of nanometres (with sizes continuously tunable between 13 nm and 20 nm) to centimetres. As well as its engineering relevance, this methodology enables systematic studies of unusual behaviours of block-copolymers in geometrically confined films.
嵌段共聚物的自组装为制造具有小尺寸（<50nm）和高密度（<100nm）特征的方法提供了途径，其精度可接近甚至满足半导体工业对纳米制造的苛刻规格要求。然而，对于实际应用，一个关键要求是在晶圆表面上具有不同分子量和组成的嵌段共聚物进行快速、高分辨率的图案化，具有复杂的几何形状和不同的特征尺寸。在这里，我们证明了一种利用电动力学效应的超高分辨率喷射打印技术，可以对基于聚（苯乙烯-嵌段-甲基丙烯酸甲酯）的各种分子量和组成的嵌段共聚物进行大面积图案化。打印的几何形状的直径和线宽在亚 500nm 范围内，线边缘粗糙度小至约 45nm，厚度均匀性和重复性可接近分子长度尺度（~2nm）。在裸基底或化学或形貌结构化基底上进行热退火后，这种打印图案会在纳米级（尺寸可在 13nm 和 20nm 之间连续可调）到厘米级的整体布局中产生具有明确定义尺寸、周期性和形态的嵌段共聚物纳米畴。除了其工程相关性外，这种方法还能够对几何受限膜中嵌段共聚物的异常行为进行系统研究。
