Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China.
Sensors (Basel). 2014 Jan 30;14(2):2417-30. doi: 10.3390/s140202417.
In response to the growing demand for in situ measurement of pressure in high-temperature environments, a high temperature capacitive pressure sensor is presented in this paper. A high-temperature ceramic material-alumina is used for the fabrication of the sensor, and the prototype sensor consists of an inductance, a variable capacitance, and a sealed cavity integrated in the alumina ceramic substrate using a thick-film integrated technology. The experimental results show that the proposed sensor has stability at 850 °C for more than 20 min. The characterization in high-temperature and pressure environments successfully demonstrated sensing capabilities for pressure from 1 to 5 bar up to 600 °C, limited by the sensor test setup. At 600 °C, the sensor achieves a linear characteristic response, and the repeatability error, hysteresis error and zero-point drift of the sensor are 8.3%, 5.05% and 1%, respectively.
针对高温环境中压力原位测量的需求日益增长，本文提出了一种高温电容压力传感器。该传感器采用高温陶瓷材料氧化铝制造，原型传感器由集成在氧化铝陶瓷基板上的电感、可变电容和密封腔组成，采用厚膜集成技术。实验结果表明，该传感器在 850°C 下稳定 20 分钟以上。在高温高压环境下的特性测试成功地证明了该传感器在高达 600°C 的 1 至 5 巴压力范围内的传感能力，这受到传感器测试设置的限制。在 600°C 时，传感器呈现出线性特性响应，其重复性误差、滞后误差和零点漂移分别为 8.3%、5.05%和 1%。
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