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高质量的氮化硅电路作为基于石墨烯的纳米光子器件的平台。

High-quality Si3N4 circuits as a platform for graphene-based nanophotonic devices.

作者信息

Gruhler N, Benz C, Jang H, Ahn J-H, Danneau R, Pernice W H P

出版信息

Opt Express. 2013 Dec 16;21(25):31678-89. doi: 10.1364/OE.21.031678.

Abstract

Hybrid circuits combining traditional nanophotonic components with carbon-based materials are emerging as a promising platform for optoelectronic devices. We demonstrate such circuits by integrating single-layer graphene films with silicon nitride waveguides as a new architecture for broadband optical operation. Using high-quality microring resonators and Mach-Zehnder interferometers with extinction ratios beyond 40 dB we realize flexible circuits for phase-sensitive detection on chip. Hybrid graphene-photonic devices are fabricated via mechanical transfer and lithographic structuring, allowing for prolonged light-matter interactions. Our approach holds promise for studying optical processes in low-dimensional physical systems and for realizing electrically tunable photonic circuits.

摘要

将传统纳米光子学元件与碳基材料相结合的混合电路正成为光电器件的一个有前途的平台。我们通过将单层石墨烯薄膜与氮化硅波导集成,展示了这种电路,作为宽带光学操作的一种新架构。使用消光比超过40 dB的高质量微环谐振器和马赫-曾德尔干涉仪,我们实现了用于片上相敏检测的灵活电路。混合石墨烯光子器件通过机械转移和光刻结构化制造,实现了延长的光与物质相互作用。我们的方法有望用于研究低维物理系统中的光学过程以及实现电可调光子电路。

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