Taylor Alice C, Edgington Robert, Jackman Richard B
ACS Appl Mater Interfaces. 2015 Apr 1;7(12):6490-5. doi: 10.1021/am507900a. Epub 2015 Mar 17.
The ability to pattern the seeding of nanodiamonds (NDs), and thus selectively control areas of diamond growth, is a useful capability for many applications, including photonics, microelectromechanical systems (MEMS) prototyping, and biomaterial design. A microprinting technique using a computer-driven micropipette has been developed to deposit patterns of ND monolayers from an unreactive water/glycerol ND ink to 5-μm resolution. The concentration and composition of the ND solution were optimized to realize high-density monolayers of NDs and consistent ND printing. Subsequent nanocrystalline diamond (NCD) patterns grown using chemical vapor deposition showed a high level of compliance with the printed ND pattern. This "direct-write", bottom-up, and additive process offers a versatile and simple alternative to pattern diamond. The process has the particular advantage that it does not require lithography or destructive processing such as reactive-ion etching (RIE) and, pertinently, does not involve reactive chemicals that could alter the surface chemistry of NDs. Furthermore, given that this process obviates the use of conventional lithography, substrates that are not suitable for lithographic processing (e.g., excessively small or three-dimensional structured substrates) can be inscribed with ND patterns. The technique also allows for the growth of discrete, localized, single-crystal nanodiamonds with applications in quantum technology.
对纳米金刚石(NDs)的播种进行图案化处理,从而选择性地控制金刚石生长区域的能力,对于许多应用来说都是一项有用的能力,包括光子学、微机电系统(MEMS)原型制作和生物材料设计。一种使用计算机驱动的微量移液器的微打印技术已被开发出来,用于将非反应性水/甘油ND油墨中的ND单层图案沉积到5微米的分辨率。对ND溶液的浓度和成分进行了优化,以实现高密度的ND单层和一致的ND打印。随后使用化学气相沉积法生长的纳米晶金刚石(NCD)图案与打印的ND图案高度吻合。这种“直写”、自下而上的加法工艺为图案化金刚石提供了一种通用且简单的替代方法。该工艺具有特别的优势,即它不需要光刻或诸如反应离子蚀刻(RIE)之类的破坏性加工,并且相关地,不涉及可能改变ND表面化学性质的反应性化学物质。此外,鉴于此工艺无需使用传统光刻技术,因此可以在不适合光刻加工的基板(例如,过小或三维结构化的基板)上刻上ND图案。该技术还允许生长离散的、局部的单晶纳米金刚石,可应用于量子技术。