Department of Electrical Engineering, Sahand University of Technology, Sahand New Town, P.O. Box 51335-1996, Tabriz, Iran.
J Adv Res. 2014 Jan;5(1):109-15. doi: 10.1016/j.jare.2013.01.001. Epub 2013 Feb 4.
Misalignment is a problematic challenge in RF MEMS resonators. It causes asymmetry in the ultra symmetric radial contour mode disk resonators and degrades their performance by increasing the insertion loss and decreasing their quality factors (Q). Self-alignment method seems to be a good solution for misalignment problem, but it cannot be directly applied on high performance ring shape anchored resonators. This paper discusses misalignment effects for the ring shape anchored resonators and proposes a method for reconfiguring its anchor to be compatible with self-alignment process. Simulation results validate that the crossed ring anchor structure has the same resonance characteristics with the complete ring shape anchored resonator.
失配是射频微机电系统（RF MEMS）谐振器的一个问题挑战。它会导致超对称径向轮廓模式盘形谐振器的不对称，并通过增加插入损耗和降低品质因数（Q）来降低其性能。自对准方法似乎是解决失配问题的一个很好的解决方案，但它不能直接应用于高性能环形固定谐振器。本文讨论了环形固定谐振器的失配效应，并提出了一种重新配置其固定结构以使其与自对准过程兼容的方法。仿真结果验证了交叉环形固定结构具有与完整环形固定谐振器相同的谐振特性。
