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基于二硫化钼和石墨烯单原子层的柔性集成电路及多功能电子器件。

Flexible integrated circuits and multifunctional electronics based on single atomic layers of MoS2 and graphene.

作者信息

Amani Matin, Burke Robert A, Proie Robert M, Dubey Madan

出版信息

Nanotechnology. 2015 Mar 20;26(11):115202. doi: 10.1088/0957-4484/26/11/115202. Epub 2015 Feb 24.

DOI:10.1088/0957-4484/26/11/115202
PMID:25709100
Abstract

Two-dimensional materials, such as graphene and its analogues, have been investigated by numerous researchers for high performance flexible and conformal electronic systems, because they offer the ultimate level of thickness scaling, atomically smooth surfaces and high crystalline quality. Here, we use layer-by-layer transfer of large area molybdenum disulphide (MoS2) and graphene grown by chemical vapor deposition (CVD) to demonstrate electronics on flexible polyimide (PI) substrates. On the same PI substrate, we are able to simultaneously fabricate MoS2 based logic, non-volatile memory cells with graphene floating gates, photo-detectors and MoS2 transistors with tunable source and drain contacts. We are also able to demonstrate that these flexible heterostructure devices have very high electronic performance, comparable to four point measurements taken on SiO2 substrates, with on/off ratios >10(7) and field effect mobilities as high as 16.4 cm(2) V(-1) s(-1). Additionally, the heterojunctions show high optoelectronic sensitivity and were operated as photodetectors with responsivities over 30 A W(-1). Through local gating of the individual graphene/MoS2 contacts, we are able to tune the contact resistance over the range of 322-1210 Ω mm for each contact, by modulating the graphene work function. This leads to devices with tunable and multifunctional performance that can be implemented in a conformable platform.

摘要

诸如石墨烯及其类似物之类的二维材料,已被众多研究人员用于高性能柔性和共形电子系统的研究,因为它们提供了极致的厚度缩放水平、原子级光滑的表面以及高结晶质量。在此,我们利用化学气相沉积(CVD)生长的大面积二硫化钼(MoS2)和石墨烯的逐层转移,来展示在柔性聚酰亚胺(PI)衬底上的电子器件。在同一PI衬底上,我们能够同时制造基于MoS2的逻辑电路、带有石墨烯浮栅的非易失性存储单元、光电探测器以及源漏接触可调的MoS2晶体管。我们还能够证明,这些柔性异质结构器件具有非常高的电子性能,与在SiO2衬底上进行的四点测量相当,开/关比>10(7),场效应迁移率高达16.4 cm(2) V(-1) s(-1)。此外,异质结显示出高的光电灵敏度,并作为响应度超过30 A W(-1)的光电探测器工作。通过对单个石墨烯/MoS2接触进行局部栅控,我们能够通过调制石墨烯的功函数,将每个接触的接触电阻在322 - 1210 Ω mm范围内进行调节。这导致了具有可调谐和多功能性能的器件,可在一个共形平台上实现。

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