Nazaretski E, Lauer K, Yan H, Bouet N, Zhou J, Conley R, Huang X, Xu W, Lu M, Gofron K, Kalbfleisch S, Wagner U, Rau C, Chu Y S
Brookhaven National Laboratory, Upton, NY, USA.
Diamond Light Source Ltd, Didcot, Oxfordshire OX11 0DE, UK.
J Synchrotron Radiat. 2015 Mar;22(2):336-41. doi: 10.1107/S1600577514025715. Epub 2015 Jan 28.
Hard X-ray microscopy is a prominent tool suitable for nanoscale-resolution non-destructive imaging of various materials used in different areas of science and technology. With an ongoing effort to push the 2D/3D imaging resolution down to 10 nm in the hard X-ray regime, both the fabrication of nano-focusing optics and the stability of the microscope using those optics become extremely challenging. In this work a microscopy system designed and constructed to accommodate multilayer Laue lenses as nanofocusing optics is presented. The developed apparatus has been thoroughly characterized in terms of resolution and stability followed by imaging experiments at a synchrotron facility. Drift rates of ∼2 nm h(-1) accompanied by 13 nm × 33 nm imaging resolution at 11.8 keV are reported.
硬X射线显微镜是一种重要工具，适用于对科学技术不同领域中使用的各种材料进行纳米级分辨率的无损成像。随着人们不断努力将硬X射线区域的二维/三维成像分辨率降低到10纳米，纳米聚焦光学器件的制造以及使用这些光学器件的显微镜的稳定性都变得极具挑战性。在这项工作中，展示了一种设计和构建的显微镜系统，该系统可容纳多层劳厄透镜作为纳米聚焦光学器件。所开发的仪器在分辨率和稳定性方面进行了全面表征，随后在同步加速器设施上进行了成像实验。报告了在11.8keV时约2纳米/小时的漂移率以及13纳米×33纳米的成像分辨率。
