一种用于NSLS-II的亚微米分辨率X射线光谱（SRX）光束线的新型基于柯克帕特里克-贝兹的扫描显微镜。
A new Kirkpatrick-Baez-based scanning microscope for the Submicron Resolution X-ray Spectroscopy (SRX) beamline at NSLS-II.
作者信息
Nazaretski E, Coburn D S, Xu W, Ma J, Xu H, Smith R, Huang X, Yang Y, Huang L, Idir M, Kiss A, Chu Y S
机构信息
National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY 11973, USA.
出版信息
J Synchrotron Radiat. 2022 Sep 1;29(Pt 5):1284-1291. doi: 10.1107/S1600577522007056. Epub 2022 Jul 29.
The development, construction, and first commissioning results of a new scanning microscope installed at the 5-ID Submicron Resolution X-ray Spectroscopy (SRX) beamline at NSLS-II are reported. The developed system utilizes Kirkpatrick-Baez mirrors for X-ray focusing. The instrument is designed to enable spectromicroscopy measurements in 2D and 3D with sub-200 nm spatial resolution. The present paper focuses on the design aspects, optical considerations, and specifics of the sample scanning stage, summarizing some of the initial commissioning results.
报道了安装在NSLS-II的5-ID亚微米分辨率X射线光谱（SRX）光束线上的新型扫描显微镜的开发、构建及首次调试结果。所开发的系统利用柯克帕特里克-贝兹镜进行X射线聚焦。该仪器旨在实现空间分辨率低于200 nm的二维和三维光谱显微镜测量。本文重点介绍了设计方面、光学考量以及样品扫描台的细节，并总结了一些初步调试结果。
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