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共轴光刻技术。

Coaxial lithography.

机构信息

1] Department of Materials Science and Engineering, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA [2] International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA.

1] International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA [2] Department of Chemistry, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA.

出版信息

Nat Nanotechnol. 2015 Apr;10(4):319-24. doi: 10.1038/nnano.2015.33. Epub 2015 Mar 23.

Abstract

The optical and electrical properties of heterogeneous nanowires are profoundly related to their composition and nanoscale architecture. However, the intrinsic constraints of conventional synthetic and lithographic techniques have limited the types of multi-compositional nanowire that can be created and studied in the laboratory. Here, we report a high-throughput technique that can be used to prepare coaxial nanowires with sub-10 nm control over the architectural parameters in both axial and radial dimensions. The method, termed coaxial lithography (COAL), relies on templated electrochemical synthesis and can create coaxial nanowires composed of combinations of metals, metal oxides, metal chalcogenides and conjugated polymers. To illustrate the possibilities of the technique, a core/shell semiconductor nanowire with an embedded plasmonic nanoring was synthesized--a structure that cannot be prepared by any previously known method--and its plasmon-excitation-dependent optoelectronic properties were characterized.

摘要

异质纳米线的光学和电学性质与其组成和纳米尺度结构密切相关。然而,传统合成和光刻技术的内在限制限制了可在实验室中创建和研究的多组分纳米线的类型。在这里,我们报告了一种高通量技术,可用于制备具有亚 10nm 控制的同轴纳米线,在轴向和径向尺寸上都可以控制建筑参数。该方法称为共轴光刻(COAL),依赖于模板电化学合成,可以创建由金属、金属氧化物、金属硫属化物和共轭聚合物组成的同轴纳米线。为了说明该技术的可能性,合成了一种具有嵌入式等离子体纳米环的核/壳半导体纳米线——这是任何以前已知的方法都无法制备的结构,并对其等离子体激发相关的光电特性进行了表征。

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