McPeak Kevin M, Jayanti Sriharsha V, Kress Stephan J P, Meyer Stefan, Iotti Stelio, Rossinelli Aurelio, Norris David J
Optical Materials Engineering Laboratory, ETH Zurich , 8092 Zurich, Switzerland.
ACS Photonics. 2015 Mar 18;2(3):326-333. doi: 10.1021/ph5004237. Epub 2015 Feb 3.
High-quality materials are critical for advances in plasmonics, especially as researchers now investigate quantum effects at the limit of single surface plasmons or exploit ultraviolet- or CMOS-compatible metals such as aluminum or copper. Unfortunately, due to inexperience with deposition methods, many plasmonics researchers deposit metals under the wrong conditions, severely limiting performance unnecessarily. This is then compounded as others follow their published procedures. In this perspective, we describe simple rules collected from the surface-science literature that allow high-quality plasmonic films of aluminum, copper, gold, and silver to be easily deposited with commonly available equipment (a thermal evaporator). Recipes are also provided so that films with optimal optical properties can be routinely obtained.
高质量材料对于等离激元学的进展至关重要,尤其是当研究人员现在在单表面等离激元的极限下研究量子效应,或利用铝或铜等与紫外线兼容或与CMOS兼容的金属时。不幸的是,由于缺乏沉积方法的经验,许多等离激元学研究人员在错误的条件下沉积金属,不必要地严重限制了性能。随着其他人遵循他们发表的程序,情况会变得更糟。从这个角度来看,我们描述了从表面科学文献中收集的简单规则,这些规则允许使用常用设备(热蒸发器)轻松沉积高质量的铝、铜、金和银等离激元薄膜。还提供了配方,以便能够常规获得具有最佳光学性能的薄膜。