Wang Xu, Qiu Lirong, Zhao Weiqian, Xiao Yang, Wang Zhongyu
Appl Opt. 2015 Feb 10;54(5):1078-84. doi: 10.1364/AO.54.001078.
In order to further improve the measurement accuracy of the laser differential confocal radius measurement system (DCRMS) developed previously, a DCRMS error compensation model is established for the error sources, including laser source offset, test sphere position adjustment offset, test sphere figure, and motion error, based on analyzing the influences of these errors on the measurement accuracy of radius of curvature. Theoretical analyses and experiments indicate that the expanded uncertainty of the DCRMS is reduced to U=0.13 μm+0.9 ppm·R (k=2) through the error compensation model. The error analysis and compensation model established in this study can provide the theoretical foundation for improving the measurement accuracy of the DCRMS.
为了进一步提高先前开发的激光微分共焦半径测量系统（DCRMS）的测量精度，在分析激光源偏移、测试球位置调整偏移、测试球形状和运动误差等误差源对曲率半径测量精度的影响的基础上，针对这些误差源建立了DCRMS误差补偿模型。理论分析和实验表明，通过该误差补偿模型，DCRMS的扩展不确定度降低至U = 0.13μm + 0.9ppm·R（k = 2）。本研究建立的误差分析和补偿模型可为提高DCRMS的测量精度提供理论依据。
