Morrison Jessica, Imboden Matthias, Little Thomas D C, Bishop D J
Opt Express. 2015 Apr 6;23(7):9555-66. doi: 10.1364/OE.23.009555.
MEMS micromirrors have proven to be very important optical devices with applications ranging from steerable mirrors for switches and cross-connects to spatial light modulators for correcting optical distortions. Usually beam steering and focusing are done with different MEMS devices and tilt angles in excess of 10 degrees are seldom obtained. Here we describe a single MEMS device that combines tip/tilt, piston mode and varifocal capability into a single, low cost device with very large tilt angles. Our device consists of a 400 micron diameter mirror driven with thermal bimorphs. We have demonstrated deflection angles of ± 40 degrees along both axes, a tunable focal length which varies between -0.48 mm to + 20.5 mm and a piston mode range of 300 microns - four separately controllable degrees of freedom in a single device. Potential applications range from smart lighting to optical switches and devices for telecom systems.
微机电系统（MEMS）微镜已被证明是非常重要的光学器件，其应用范围从用于开关和交叉连接的可控镜到用于校正光学畸变的空间光调制器。通常，光束转向和聚焦由不同的MEMS器件完成，很少能获得超过10度的倾斜角。在此，我们描述了一种单一的MEMS器件，它将尖端/倾斜、活塞模式和可变焦距功能集成到一个低成本的单一器件中，且具有非常大的倾斜角。我们的器件由一个直径400微米的镜子组成，由热双压电晶片驱动。我们已经证明，该器件在两个轴向上的偏转角为±40度，可调焦距在-0.48毫米至+20.5毫米之间变化，活塞模式范围为300微米——在一个单一器件中具有四个可单独控制的自由度。潜在应用范围从智能照明到光开关以及电信系统的器件。
