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带有压阻式聚焦传感器的谐振变焦距微镜

Resonant Varifocal Micromirror with Piezoresistive Focus Sensor.

作者信息

Nakazawa Kenta, Sasaki Takashi, Furuta Hiromasa, Kamiya Jiro, Sasaki Hideki, Kamiya Toshikazu, Hane Kazuhiro

机构信息

Department of Nanomechanics, Tohoku University, Aramaki-aza Aoba 6-6-01, Aoba-ku, Sendai 980-8579, Japan.

Research & Development Center, Panasonic Industrial Devices SUNX Co., Ltd.; Ushiyama-cho 2431-1, Kasugai 486-0901, Japan.

出版信息

Micromachines (Basel). 2016 Mar 30;7(4):57. doi: 10.3390/mi7040057.

DOI:10.3390/mi7040057
PMID:30407430
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6190170/
Abstract

This paper reports a microelectromechanical systems (MEMS) resonant varifocal mirror integrated with piezoresistive focus sensor. The varifocal mirror is driven electrostatically at a resonant frequency of a mirror plate to obtain the wide scanning range of a focal length. A piezoresistor is used to monitor the focal length of the varifocal mirror. The device is made of a silicon-on-insulator (SOI) wafer and a glass wafer. A mirror plate and a counter electrode are fabricated by a top silicon layer of the SOI wafer and on the glass wafer, respectively. The piezoresistor is fabricated by ion implantation on a supporting beam of the mirror plate. The stress variation of the beam, which is detected by the piezoresistor, correspond the focal length of the varifocal mirror. The focus length varies from -41 to 35 mm at the resonant frequency of 9.5 kHz. The focal length of the varifocal mirror is monitored by the piezoresistor in real time.

摘要

本文报道了一种集成压阻式聚焦传感器的微机电系统（MEMS）谐振变焦镜。变焦镜在镜板的谐振频率下通过静电驱动，以获得宽焦距扫描范围。使用压阻器来监测变焦镜的焦距。该器件由绝缘体上硅（SOI）晶圆和玻璃晶圆制成。镜板和反电极分别由SOI晶圆的顶部硅层和玻璃晶圆制成。压阻器通过离子注入在镜板的支撑梁上制造。压阻器检测到的梁的应力变化与变焦镜的焦距相对应。在9.5kHz的谐振频率下，焦距从-41mm变化到35mm。变焦镜的焦距由压阻器实时监测。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/c16322ac3a1c/micromachines-07-00057-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/05c648596ebf/micromachines-07-00057-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/aa47bd78a3c1/micromachines-07-00057-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/9e27082fe790/micromachines-07-00057-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/0341db8df100/micromachines-07-00057-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/b96d99022dee/micromachines-07-00057-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/c66309090736/micromachines-07-00057-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/abaa11d74081/micromachines-07-00057-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/72ab8a25ce8d/micromachines-07-00057-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/12b0631a8eb1/micromachines-07-00057-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/caa8a93003a1/micromachines-07-00057-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/6faaa437c9b4/micromachines-07-00057-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/c16322ac3a1c/micromachines-07-00057-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/05c648596ebf/micromachines-07-00057-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/aa47bd78a3c1/micromachines-07-00057-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/9e27082fe790/micromachines-07-00057-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/0341db8df100/micromachines-07-00057-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/b96d99022dee/micromachines-07-00057-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/c66309090736/micromachines-07-00057-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/abaa11d74081/micromachines-07-00057-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/72ab8a25ce8d/micromachines-07-00057-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/12b0631a8eb1/micromachines-07-00057-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/caa8a93003a1/micromachines-07-00057-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/6faaa437c9b4/micromachines-07-00057-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/13fa/6190170/c16322ac3a1c/micromachines-07-00057-g012.jpg

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本文引用的文献

1
Nonlinear dynamics of nanomechanical beam resonators: improving the performance of NEMS-based sensors.纳米机械梁谐振器的非线性动力学：提高基于纳米机电系统（NEMS）的传感器性能
Nanotechnology. 2009 Jul 8;20(27):275501. doi: 10.1088/0957-4484/20/27/275501. Epub 2009 Jun 16.