Lewis Brett B, Stanford Michael G, Fowlkes Jason D, Lester Kevin, Plank Harald, Rack Philip D
Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA.
Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA ; Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37381, USA.
Beilstein J Nanotechnol. 2015 Apr 8;6:907-18. doi: 10.3762/bjnano.6.94. eCollection 2015.
Platinum-carbon nanostructures deposited via electron beam induced deposition from MeCpPt(IV)Me3 are purified during a post-deposition electron exposure treatment in a localized oxygen ambient at room temperature. Time-dependent studies demonstrate that the process occurs from the top-down. Electron beam energy and current studies demonstrate that the process is controlled by a confluence of the electron energy loss and oxygen concentration. Furthermore, the experimental results are modeled as a 2nd order reaction which is dependent on both the electron energy loss density and the oxygen concentration. In addition to purification, the post-deposition electron stimulated oxygen purification process enhances the resolution of the EBID process due to the isotropic carbon removal from the as-deposited materials which produces high-fidelity shape retention.
通过电子束诱导沉积从甲基环戊二烯基铂（IV）三甲基沉积的铂-碳纳米结构，在室温下于局部氧气环境中进行沉积后电子曝光处理时被纯化。随时间变化的研究表明，该过程是自上而下发生的。电子束能量和电流研究表明，该过程由电子能量损失和氧气浓度的共同作用控制。此外，实验结果被模拟为二级反应，该反应取决于电子能量损失密度和氧气浓度。除了纯化之外，沉积后电子激发的氧气纯化过程还提高了电子束诱导沉积过程的分辨率，这是因为从沉积材料中各向同性地去除碳，从而实现了高保真形状保留。
