†Laboratorio de Microscopías Avanzadas (LMA), Instituto de Nanociencia de Aragón (INA), Universidad de Zaragoza, 50018 Zaragoza, Spain.
‡Departamento de Física de la Materia Condensada, Universidad de Zaragoza, 50009 Zaragoza, Spain.
ACS Nano. 2015 Jun 23;9(6):6139-46. doi: 10.1021/acsnano.5b01383. Epub 2015 Jun 8.
The successful application of focused electron (and ion) beam induced deposition techniques for the growth of nanowires on flexible and transparent polycarbonate films is reported here. After minimization of charging effects in the substrate, sub-100 nm-wide Pt, W, and Co nanowires have been grown and their electrical conduction is similar compared to the use of standard Si-based substrates. Experiments where the substrate is bent in a controlled way indicate that the electrical conduction is stable up to high bending angles, >50°, for low-resistivity Pt nanowires grown by the ion beam. On the other hand, the resistance of Pt nanowires grown by the electron beam changes significantly and reversibly with the bending angle. Aided by the substrate transparency, a diffraction grating in transmission mode has been built based on the growth of an array of Pt nanowires that shows sharp diffraction spots. The set of results supports the large potential of focused beam deposition as a high-resolution nanolithography technique on transparent and flexible substrates. The most promising applications are expected in flexible nano-optics and nanoplasmonics, flexible electronics, and nanosensing.
本文报道了在柔性透明聚碳酸酯薄膜上成功应用聚焦电子（和离子）束诱导沉积技术生长纳米线。在最小化衬底的荷电效应后，我们成功生长了宽度小于 100nm 的 Pt、W 和 Co 纳米线，并且与使用标准的基于 Si 的衬底相比，它们的电导性能相似。通过控制衬底弯曲的实验表明，对于通过离子束生长的低电阻率 Pt 纳米线，其电导性能在高达 50°以上的高弯曲角度下是稳定的。另一方面，通过电子束生长的 Pt 纳米线的电阻随弯曲角度的变化而显著且可逆。借助衬底的透明度，我们在 Pt 纳米线阵列的生长基础上构建了一个透射模式的衍射光栅，其显示出尖锐的衍射光斑。这一系列结果支持聚焦束沉积作为在透明和柔性衬底上进行高分辨率纳米光刻技术的巨大潜力。最有前途的应用预计将在柔性纳米光学和等离子体光学、柔性电子学和纳米传感领域。
