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铁电薄膜中的可重构类掺杂极化电荷。

Polarization charge as a reconfigurable quasi-dopant in ferroelectric thin films.

机构信息

Ceramics Laboratory, EPFL Swiss Federal Institute of Technology, Lausanne CH-1015, Switzerland.

1] Ceramics Laboratory, EPFL Swiss Federal Institute of Technology, Lausanne CH-1015, Switzerland [2] DPMC, University of Geneva, 24 Quai Ernest Ansermet, Geneva 4 1211, Switzerland.

出版信息

Nat Nanotechnol. 2015 Jul;10(7):614-8. doi: 10.1038/nnano.2015.114. Epub 2015 Jun 15.

Abstract

Impurity elements used as dopants are essential to semiconductor technology for controlling the concentration of charge carriers. Their location in the semiconductor crystal is determined during the fabrication process and remains fixed. However, another possibility exists whereby the concentration of charge carriers is modified using polarization charge as a quasi-dopant, which implies the possibility to write, displace, erase and re-create channels having a metallic-type conductivity inside a wide-bandgap semiconductor matrix. Polarization-charge doping is achieved in ferroelectrics by the creation of charged domain walls. The intentional creation of stable charged domain walls has so far only been reported in BaTiO3 single crystals, with a process that involves cooling the material through its phase transition under a strong electric bias, but this is not a viable technology when real-time reconfigurability is sought in working devices. Here, we demonstrate a technique allowing the creation and nanoscale manipulation of charged domain walls and their action as a real-time doping activator in ferroelectric thin films. Stable individual and multiple conductive channels with various lengths from 3 μm to 100 nm were created, erased and recreated in another location, and their high metallic-type conductivity was verified. This takes the idea of hardware reconfigurable electronics one step forward.

摘要

杂质元素被用作掺杂剂,对于控制电荷载流子浓度的半导体技术来说是必不可少的。它们在制造过程中的位置是由掺杂元素决定的,并且是固定的。然而,还有另一种可能性,即通过使用极化电荷作为准掺杂剂来修改电荷载流子的浓度,这意味着有可能在宽带隙半导体基质中写入、移动、擦除和重新创建具有金属型导电性的通道。在铁电体中,通过形成带电畴壁来实现极化电荷掺杂。在 BaTiO3 单晶中,已经有报道通过在强电场偏置下冷却材料通过其相变来有意地产生稳定的带电畴壁,但在实际工作器件中寻求实时可重构性时,这不是一种可行的技术。在这里,我们展示了一种允许在铁电薄膜中创建和纳米级操纵带电畴壁的技术,以及它们作为实时掺杂激活剂的作用。我们成功地在薄膜中创建、擦除和重新创建了具有不同长度(从 3μm 到 100nm)的稳定单个和多个导电通道,并验证了其具有高金属型导电性。这使硬件可重构电子学的概念向前迈进了一步。

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