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半导体纳米线发光二极管生长在金属上:大规模制备纳米线器件的一个方向。

Semiconductor Nanowire Light-Emitting Diodes Grown on Metal: A Direction Toward Large-Scale Fabrication of Nanowire Devices.

机构信息

Department of Electrical and Computer Engineering, The Ohio State University, Columbus, OH, 43210, USA.

Department of Materials Science and Engineering, The Ohio State University, Columbus, OH, 43210, USA.

出版信息

Small. 2015 Oct 28;11(40):5402-8. doi: 10.1002/smll.201501909. Epub 2015 Aug 25.

Abstract

Bottom-up nanowires are attractive for realizing semiconductor devices with extreme heterostructures because strain relaxation through the nanowire sidewalls allows the combination of highly lattice mismatched materials without creating dislocations. The resulting nanowires are used to fabricate light-emitting diodes (LEDs), lasers, solar cells, and sensors. However, expensive single crystalline substrates are commonly used as substrates for nanowire heterostructures as well as for epitaxial devices, which limits the manufacturability of nanowire devices. Here, nanowire LEDs directly grown and electrically integrated on metal are demonstrated. Optical and structural measurements reveal high-quality, vertically aligned GaN nanowires on molybdenum and titanium films. Transmission electron microscopy confirms the composition variation in the polarization-graded AlGaN nanowire LEDs. Blue to green electroluminescence is observed from InGaN quantum well active regions, while GaN active regions exhibit ultraviolet emission. These results demonstrate a pathway for large-scale fabrication of solid state lighting and optoelectronics on metal foils or sheets.

摘要

自下而上的纳米线在实现具有极端异质结构的半导体器件方面具有吸引力,因为通过纳米线侧壁的应变松弛允许在不产生位错的情况下组合晶格高度失配的材料。由此产生的纳米线用于制造发光二极管(LED)、激光、太阳能电池和传感器。然而,昂贵的单晶衬底通常被用作纳米线异质结构以及外延器件的衬底,这限制了纳米线器件的制造可行性。这里,直接在金属上生长并进行电集成的纳米线 LED 得到了展示。光学和结构测量揭示了钼和钛薄膜上高质量、垂直对齐的 GaN 纳米线。透射电子显微镜证实了极化渐变 AlGaN 纳米线 LED 中的组成变化。从 InGaN 量子阱有源区观察到蓝到绿的电致发光,而 GaN 有源区则表现出紫外发射。这些结果展示了在金属箔或片上大规模制造固态照明和光电的途径。

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