Zhang Xiaoyang, Koppal Sanjeev J, Zhang Rui, Zhou Liang, Butler Elizabeth, Xie Huikai
Opt Express. 2016 Feb 22;24(4):3479-87. doi: 10.1364/OE.24.003479.
Microelectromechanical (MEMS) mirrors have extended vision capabilities onto small, low-power platforms. However, the field-of-view (FOV) of these MEMS mirrors is usually less than 90° and any increase in the MEMS mirror scanning angle has design and fabrication trade-offs in terms of power, size, speed and stability. Therefore, we need techniques to increase the scanning range while still maintaining a small form factor. In this paper we exploit our recent breakthrough that has enabled the immersion of MEMS mirrors in liquid. While allowing the MEMS to move, the liquid additionally provides a "Snell's window" effect and enables an enlarged FOV (≈ 150°). We present an optimized MEMS mirror design and use it to demonstrate applications in extreme wide-angle structured light.
微机电系统（MEMS）反射镜已将视觉功能扩展到小型、低功耗平台上。然而，这些MEMS反射镜的视场（FOV）通常小于90°，并且MEMS反射镜扫描角度的任何增加在功率、尺寸、速度和稳定性方面都存在设计和制造上的权衡。因此，我们需要在保持小尺寸的同时增加扫描范围的技术。在本文中，我们利用了最近的一项突破，即能够将MEMS反射镜浸入液体中。在允许MEMS移动的同时，液体还提供了一种“斯涅尔窗”效应，并实现了更大的视场（约150°）。我们提出了一种优化的MEMS反射镜设计，并将其用于演示在极广角结构光中的应用。
