Wang Ruijun, Muneeb Muhammad, Sprengel Stephan, Boehm Gerhard, Malik Aditya, Baets Roel, Amann Markus-Christian, Roelkens Gunther
Opt Express. 2016 Apr 18;24(8):8480-90. doi: 10.1364/OE.24.008480.
2-µm-wavelength-range silicon-on-insulator (SOI) arrayed waveguide gratings (AWGs) with heterogeneously integrated InP-based type-II quantum well photodetectors are presented. Low insertion loss (2.5-3 dB) and low crosstalk (-30 to -25 dB) AWGs are realized. The InP-based type-II photodetectors are integrated with the AWGs using two different coupling approaches. Adiabatic-taper-based photodetectors show a responsivity of 1.6 A/W at 2.35 µm wavelength and dark current of 10 nA at -0.5 V, while photodetectors using grating-assisted coupling have a responsivity of 0.1 A/W and dark current of 5 nA at -0.5 V. The integration of the photodetector array does not degrade the insertion loss and crosstalk of the device. The photodetector epitaxial stack can also be used to realize the integration of a broadband light source, thereby enabling fully integrated spectroscopic systems.
本文介绍了一种波长范围为2微米的绝缘体上硅(SOI)阵列波导光栅(AWG),该器件与基于InP的II型量子阱光电探测器进行了异质集成。实现了低插入损耗(2.5-3dB)和低串扰(-30至-25dB)的AWG。基于InP的II型光电探测器通过两种不同的耦合方法与AWG集成。基于绝热锥形的光电探测器在2.35微米波长下的响应度为1.6A/W,在-0.5V时的暗电流为10nA,而使用光栅辅助耦合的光电探测器在-0.5V时的响应度为0.1A/W,暗电流为5nA。光电探测器阵列的集成不会降低器件的插入损耗和串扰。光电探测器外延叠层还可用于实现宽带光源的集成,从而实现完全集成的光谱系统。