Li Xueming, Wei Lei, Poelma René H, Vollebregt Sten, Wei Jia, Urbach Hendrik Paul, Sarro Pasqualina M, Zhang Guo Qi
Department of Microelectronics, Delft University of Technology, Delft, 2628 CT, The Netherlands.
Department of Imaging Physics, Delft University of Technology, Delft, 2628 CH, The Netherlands.
Sci Rep. 2016 May 3;6:25348. doi: 10.1038/srep25348.
This paper presents a tuneable binary amplitude Fresnel lens produced by wafer-level microfabrication. The Fresnel lens is fabricated by encapsulating lithographically defined vertically aligned carbon nanotube (CNT) bundles inside a polydimethyl-siloxane (PDMS) layer. The composite lens material combines the excellent optical absorption properties of the CNT with the transparency and stretchability of the PDMS. By stretching the elastomeric composite in radial direction, the lens focal length is tuned. Good focusing response is demonstrated and a large focus change (≥24%) was achieved by stretching lenses up to 11.4%.
本文介绍了一种通过晶圆级微加工制造的可调谐二元振幅菲涅耳透镜。该菲涅耳透镜是通过将光刻定义的垂直排列的碳纳米管(CNT)束封装在聚二甲基硅氧烷(PDMS)层内制成的。复合透镜材料将CNT优异的光吸收特性与PDMS的透明度和可拉伸性结合在一起。通过在径向方向上拉伸弹性体复合材料来调节透镜焦距。展示了良好的聚焦响应,通过将透镜拉伸高达11.4%,实现了较大的焦距变化(≥24%)。