Chun Sung-Yong
J Nanosci Nanotechnol. 2016 Feb;16(2):2076-9. doi: 10.1166/jnn.2016.11942.
Niobium nitride coatings for the surface modified proton exchange membrane fuel cells with various pulse parameters have been prepared using dc (direct current) and asymmetric-bipolar pulsed dc magnetron sputtering. The pulse frequency and the duty cycle were varied from 5 to 50 kHz and 50 to 95%, respectively. The deposition rate, grain size and resistivity of pulsed dc sputtered films were decreased when the pulse frequency increased, while the nano hardness of niobium nitride films increased. We present in detail coatings (e.g., deposition rate, grain size, prefer-orientation, resistivity and hardness). Our studies show that niobium nitride coatings with superior properties can be prepared using asymmetric-bipolar pulsed dc sputtering.
采用直流（direct current，dc）和非对称双极脉冲直流磁控溅射制备了具有不同脉冲参数的表面改性质子交换膜燃料电池氮化铌涂层。脉冲频率和占空比分别在5至50 kHz和50至95%之间变化。脉冲直流溅射薄膜的沉积速率、晶粒尺寸和电阻率随脉冲频率增加而降低，而氮化铌薄膜的纳米硬度增加。我们详细介绍了涂层（例如沉积速率、晶粒尺寸、择优取向、电阻率和硬度）。我们的研究表明，采用非对称双极脉冲直流溅射可以制备出具有优异性能的氮化铌涂层。
