用于锂电池电极材料的非对称双极脉冲直流溅射纳米晶VN涂层

Asymmetric Bipolar Pulsed dc Sputtered Nanocrystalline VN Coatings for Electrode Materials in Lithium Battery.

作者信息

Chun Sung-Yong

机构信息

Department of Advanced Materials Science and Engineering, Mokpo National University, Jeonnam 534-729, Republic of Korea.

出版信息

J Nanosci Nanotechnol. 2018 Feb 1;18(2):1495-1498. doi: 10.1166/jnn.2018.14921.

DOI:10.1166/jnn.2018.14921

PMID:29448622

Abstract

Nanocrystalline vanadium nitride (VN) coatings for electrode materials for lithium battery with various deposition parameters have been prepared using dc and asymmetric bipolar pulsed dc magnetron sputtering. The deposition parameters such as pulse frequency and the duty cycle were varied from 0 to 50 kHz and 100 to 75%, respectively. Microstructural, crystallographic and electrical characterizations were performed by FE-SEM, AFM, XRD and 4-point probe method. With an increase in pulse frequency, coating microstructure evolved from a porous columnar structure to a highly dense one. Single- phase cubic (FCC) VN coatings with different preferential orientations were obtained as a function of pulse frequency. Minimum resistivity of 108 μΩ-cm was obtained for the coatings deposited at pulse frequency of 25 kHz.

摘要

采用直流和非对称双极脉冲直流磁控溅射制备了具有不同沉积参数的用于锂电池电极材料的纳米晶氮化钒（VN）涂层。脉冲频率和占空比等沉积参数分别在0至50 kHz和100%至75%范围内变化。通过场发射扫描电子显微镜（FE-SEM）、原子力显微镜（AFM）、X射线衍射仪（XRD）和四点探针法进行了微观结构、晶体结构和电学表征。随着脉冲频率的增加，涂层微观结构从多孔柱状结构演变为高度致密的结构。根据脉冲频率的不同，获得了具有不同择优取向的单相立方（FCC）VN涂层。在25 kHz脉冲频率下沉积的涂层获得了108 μΩ·cm的最低电阻率。