Chun Sung-Yong
J Nanosci Nanotechnol. 2015 Jan;15(1):532-5. doi: 10.1166/jnn.2015.8398.
Chromium nitride films used as important surface modified bearings for the wind power systems have been prepared using DC (direct current) and ICP assisted magnetron sputtering. The applied ICP power was varied from 0 to 500 W. The deposition rate and nano-grain size of ICP assisted films were decreased when the ICP power increased, while the corrosion resistance and mechanical properties of chromium nitride films increased. We present in detail coatings (e.g., deposition rate, grain size, prefer-orientation, corrosion resistance and hardness). Our studies show that chromium nitride coatings with superior properties can be prepared using ICP assisted sputtering.
氮化铬薄膜作为风力发电系统重要的表面改性轴承，已采用直流（direct current，DC）和电感耦合等离子体（ICP）辅助磁控溅射法制备。施加的ICP功率在0至500瓦之间变化。随着ICP功率的增加，ICP辅助薄膜的沉积速率和纳米晶粒尺寸减小，而氮化铬薄膜的耐腐蚀性和机械性能提高。我们详细介绍了涂层（例如沉积速率、晶粒尺寸、择优取向、耐腐蚀性和硬度）。我们的研究表明，采用ICP辅助溅射可以制备出具有优异性能的氮化铬涂层。
