The Structure and Properties of Inductively Coupled Plasma Assisted Magnetron Sputtered Nanocrystalline CrN Films for Bearings of Wind Power Systems.

Chromium nitride films used as important surface modified bearings for the wind power systems have been prepared using DC (direct current) and ICP assisted magnetron sputtering. The applied ICP power was varied from 0 to 500 W. The deposition rate and nano-grain size of ICP assisted films were decreased when the ICP power increased, while the corrosion resistance and mechanical properties of chromium nitride films increased. We present in detail coatings (e.g., deposition rate, grain size, prefer-orientation, corrosion resistance and hardness). Our studies show that chromium nitride coatings with superior properties can be prepared using ICP assisted sputtering.