Chun Sung-Yong
J Nanosci Nanotechnol. 2016 Feb;16(2):2010-3. doi: 10.1166/jnn.2016.11996.
Niobium nitride coatings for the surface modified die casting molds with various ICP powers have been prepared using ICP assisted magnetron sputtering. The applied ICP power was varied from 0 to 200 W. The deposited coatings were characterized post-deposition using X-ray diffractometry (XRD) and atomic force microscopy (AFM). Single NbN phased coatings with nano-grain sized (<7.6 nm) were identified. The corrosion resistance and hardness of each coating were evaluated from potentiostat and nanoindentator. Superior corrosion protective coatings in excess of 13.9 GPa were deposited with assistance of ICP plasma during sputtering.
采用电感耦合等离子体（ICP）辅助磁控溅射法制备了具有不同ICP功率的表面改性压铸模具氮化铌涂层。施加的ICP功率在0至200瓦之间变化。沉积后的涂层使用X射线衍射仪（XRD）和原子力显微镜（AFM）进行表征。鉴定出具有纳米晶粒尺寸（<7.6纳米）的单相NbN涂层。通过恒电位仪和纳米压痕仪评估每种涂层的耐腐蚀性和硬度。在溅射过程中借助ICP等离子体沉积了硬度超过13.9 GPa的优异防腐涂层。
