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基于喷雾沉积碳纳米管薄膜气敏特性的表面清洁程序评估:热处理和氧等离子体处理

Evaluation of Surface Cleaning Procedures in Terms of Gas Sensing Properties of Spray-Deposited CNT Film: Thermal- and O₂ Plasma Treatments.

作者信息

Kim Joon Hyub, Song Min-Jung, Kim Ki Beom, Jin Joon-Hyung, Min Nam Ki

机构信息

Department of Electro-Mechanical Systems Engineering, Korea University, 2511 Sejong-ro, Sejong City 339-770, Korea.

College of Liberal Art & Interdisciplinary Studies, Kyonggi University, 154-42 Gwanggyosan-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do 443-760, Korea.

出版信息

Sensors (Basel). 2016 Dec 30;17(1):73. doi: 10.3390/s17010073.

Abstract

The effect of cleaning the surface of single-walled carbon nanotube (SWNT) networks by thermal and the O₂ plasma treatments is presented in terms of NH₃ gas sensing characteristics. The goal of this work is to determine the relationship between the physicochemical properties of the cleaned surface (including the chemical composition, crystal structure, hydrophilicity, and impurity content) and the sensitivity of the SWNT network films to NH₃ gas. The SWNT networks are spray-deposited on pre-patterned Pt electrodes, and are further functionalized by heating on a programmable hot plate or by O₂ plasma treatment in a laboratory-prepared plasma chamber. Cyclic voltammetry was employed to semi-quantitatively evaluate each surface state of various plasma-treated SWNT-based electrodes. The results show that O₂ plasma treatment can more effectively modify the SWNT network surface than thermal cleaning, and can provide a better conductive network surface due to the larger number of carbonyl/carboxyl groups, enabling a faster electron transfer rate, even though both the thermal cleaning and the O₂ plasma cleaning methods can eliminate the organic solvent residues from the network surface. The NH₃ sensors based on the O₂ plasma-treated SWNT network exhibit higher sensitivity, shorter response time, and better recovery of the initial resistance than those prepared employing the thermally-cleaned SWNT networks.

摘要

从NH₃气敏特性方面介绍了通过热处理和O₂等离子体处理清洁单壁碳纳米管(SWNT)网络表面的效果。这项工作的目的是确定清洁表面的物理化学性质(包括化学成分、晶体结构、亲水性和杂质含量)与SWNT网络薄膜对NH₃气体的灵敏度之间的关系。将SWNT网络喷涂在预先图案化的Pt电极上,并通过在可编程热板上加热或在实验室制备的等离子体室中进行O₂等离子体处理进一步功能化。采用循环伏安法半定量评估各种等离子体处理的基于SWNT的电极的每个表面状态。结果表明,与热清洁相比,O₂等离子体处理可以更有效地修饰SWNT网络表面,并且由于大量的羰基/羧基基团,可以提供更好的导电网络表面,从而实现更快的电子转移速率,尽管热清洁和O₂等离子体清洁方法都可以从网络表面去除有机溶剂残留物。基于O₂等离子体处理的SWNT网络的NH₃传感器比采用热清洁的SWNT网络制备的传感器表现出更高的灵敏度、更短的响应时间和更好的初始电阻恢复。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27ea/5298646/fc3a951d2ab2/sensors-17-00073-g001.jpg

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