Park Chongdo, Kim Se-Hyun, Ki Sanghoon, Ha Taekyun, Cho Boklae
Accelerator Division, Pohang Accelerator Laboratory, POSTECH.
Center for Advanced Instrumentation, Korea Research Institute of Standards and Science;
J Vis Exp. 2016 Dec 13(118):55017. doi: 10.3791/55017.
Steels are commonly used materials in the fabrication of vacuum systems because of their good mechanical, corrosion, and vacuum properties. A variety of steels meet the criterion of low outgassing required for high or ultrahigh vacuum applications. However, a given material can present different outgassing rates depending on its manufacturing process or the various pretreatment processes involved during the fabrication. Thus, the measurement of outgassing rates is highly desirable for a specific vacuum application. For this reason, the rate-of-pressure rise (RoR) method is often used to measure the outgassing of hydrogen after bakeout. In this article, a detailed description of the design and execution of the experimental protocol involved in the RoR method is provided. The RoR method uses a spinning rotor gauge to minimize errors that stem from outgassing or the pumping action of a vacuum gauge. The outgassing rates of two ordinary steels (stainless steel and mild steel) were measured. The measurements were made before and after the heat pretreatment of the steels. The heat pretreatment of steels was performed to reduce the outgassing. Extremely low rates of outgassing (on the order of 10 Pa m sec m) can be routinely measured using relatively small samples.
由于具有良好的机械性能、耐腐蚀性和真空性能,钢材是真空系统制造中常用的材料。多种钢材符合高真空或超高真空应用所需的低放气标准。然而,给定的材料根据其制造工艺或制造过程中涉及的各种预处理工艺可能呈现不同的放气速率。因此,对于特定的真空应用,非常需要测量放气速率。出于这个原因,压力上升速率(RoR)方法经常用于测量烘烤后的氢气放气。本文详细描述了RoR方法所涉及的实验方案的设计与实施。RoR方法使用旋转转子规来最小化因放气或真空计的抽气作用而产生的误差。测量了两种普通钢材(不锈钢和低碳钢)的放气速率。测量在钢材进行热预处理之前和之后进行。对钢材进行热预处理以减少放气。使用相对较小的样品通常可以测量到极低的放气速率(约为10 Pa·m²·s⁻¹)。