Yan Han, Zhang Wen-Ming, Jiang Hui-Ming, Hu Kai-Ming
State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
Department of Mechanical Engineering, University of California Berkeley, Berkeley, CA 94720, USA.
Sensors (Basel). 2017 Jan 8;17(1):114. doi: 10.3390/s17010114.
In this article, the pull-in instability and dynamic characteristics of electrostatically actuated suspended microchannel resonators are studied. A theoretical model is presented to describe the pull-in effect of suspended microchannel resonators by considering the electrostatic field and the internal fluid. The results indicate that the system is subjected to both the pull-in instability and the flutter. The former is induced by the applied voltage which exceeds the pull-in value while the latter occurs as the velocity of steady flow get closer to the critical velocity. The statically and dynamically stable regions are presented by thoroughly studying the two forms of instability. It is demonstrated that the steady flow can remarkably extend the dynamic stable range of pull-in while the applied voltage slightly decreases the critical velocity. It is also shown that the dc voltage and the steady flow can adjust the resonant frequency while the ac voltage can modulate the vibrational amplitude of the resonator.
本文研究了静电驱动悬浮微通道谐振器的拉入不稳定性和动态特性。提出了一个理论模型，通过考虑静电场和内部流体来描述悬浮微通道谐振器的拉入效应。结果表明，该系统同时受到拉入不稳定性和颤振的影响。前者是由超过拉入值的外加电压引起的，而后者则是在稳定流速度接近临界速度时发生的。通过深入研究这两种不稳定性形式，给出了静态和动态稳定区域。结果表明，稳定流可以显著扩展拉入的动态稳定范围，而外加电压会略微降低临界速度。还表明，直流电压和稳定流可以调节谐振频率，而交流电压可以调制谐振器的振动幅度。
