Corrosion Protection of Copper Using AlO, TiO, ZnO, HfO, and ZrO Atomic Layer Deposition.

Atomic layer deposition (ALD) is a viable means to add corrosion protection to copper metal. Ultrathin films of AlO, TiO, ZnO, HfO, and ZrO were deposited on copper metal using ALD, and their corrosion protection properties were measured using electrochemical impedance spectroscopy (EIS) and linear sweep voltammetry (LSV). Analysis of ∼50 nm thick films of each metal oxide demonstrated low electrochemical porosity and provided enhanced corrosion protection from aqueous NaCl solution. The surface pretreatment and roughness was found to affect the extent of the corrosion protection. Films of AlO or HfO provided the highest level of initial corrosion protection, but films of HfO exhibited the best coating quality after extended exposure. This is the first reported instance of using ultrathin films of HfO or ZrO produced with ALD for corrosion protection, and both are promising materials for corrosion protection.