neaspec GmbH, Bunsenstrasse 5, Martinsried, Munich D-821152, Germany.
Laboratoire de Simulation Atomistique (L_Sim) , SP2M, UMR-E CEA/UJF-Grenoble 1, INAC, Grenoble F-38054, France.
ACS Nano. 2017 Feb 28;11(2):1530-1539. doi: 10.1021/acsnano.6b06853. Epub 2017 Feb 9.
Selective lateral epitaxial (SLE) semiconductor nanowires (NWs), with their perfect in-plane epitaxial alignment, ability to form lateral complex p-n junctions in situ, and compatibility with planar processing, are a distinctive platform for next-generation device development. However, the incorporation and distribution of impurity dopants in these planar NWs via the vapor-liquid-solid growth mechanism remain relatively unexplored. Here, we present a detailed study of SLE planar GaAs NWs containing multiple alternating axial segments doped with Si and Zn impurities by metalorganic chemical vapor deposition. The dopant profile of the lateral multi-p-n junction GaAs NWs was imaged simultaneously with nanowire topography using scanning microwave impedance microscopy and correlated with infrared scattering-type near-field optical microscopy. Our results provide unambiguous evidence that Zn dopants in the periodically twinned and topologically corrugated p-type segments are preferentially segregated at twin plane boundaries, while Si impurity atoms are uniformly distributed within the n-type segments of the NWs. These results are further supported by microwave impedance modulation microscopy. The density functional theory based modeling shows that the presence of Zn dopant atoms reduces the formation energy of these twin planes, and the effect becomes significantly stronger with a slight increase of Zn concentration. This implies that the twin formation is expected to appear when a threshold planar concentration of Zn is achieved, making the onset and twin periodicity dependent on both Zn concentration and nanowire diameter, in perfect agreement with our experimental observations.
选择性侧向外延(SLE)半导体纳米线(NWs)具有完美的面内外延对准、原位形成侧向复杂 p-n 结的能力以及与平面处理的兼容性,是下一代器件开发的独特平台。然而,通过汽-液-固生长机制在这些平面 NWs 中掺入和分布杂质掺杂剂的情况仍相对未知。在这里,我们通过金属有机化学气相沉积(MOCVD)详细研究了含有 Si 和 Zn 杂质的多个交替轴向段的 SLE 平面 GaAs NWs。使用扫描微波阻抗显微镜(S-MIM)同时对侧向多 p-n 结 GaAs NWs 的掺杂轮廓和纳米线形貌进行成像,并与红外散射型近场光学显微镜(IR-SNOM)相关联。我们的结果提供了明确的证据,表明周期性孪晶和拓扑波纹的 p 型段中的 Zn 掺杂剂优先在孪晶面边界处偏析,而 Si 杂质原子均匀分布在 NWs 的 n 型段中。微波阻抗调制显微镜进一步支持了这些结果。基于密度泛函理论的建模表明,Zn 掺杂原子的存在降低了这些孪晶面的形成能,并且随着 Zn 浓度的轻微增加,这种效应变得明显更强。这意味着当达到 Zn 的平面浓度阈值时,预计会出现孪晶形成,因此起始和孪晶周期性取决于 Zn 浓度和纳米线直径,与我们的实验观察结果完全一致。