Department of Physics, Harvard University , Cambridge, Massachusetts 02138, United States.
Department of Physics and Center for Humanities and Sciences, Kyung Hee University , Seoul 02447, Republic of Korea.
Nano Lett. 2017 Aug 9;17(8):4781-4786. doi: 10.1021/acs.nanolett.7b01536. Epub 2017 Jul 18.
Monolayer MoS, among many other transition metal dichalcogenides, holds great promise for future applications in nanoelectronics and optoelectronics due to its ultrathin nature, flexibility, sizable band gap, and unique spin-valley coupled physics. However, careful study of these properties at low temperature has been hindered by an inability to achieve low-temperature Ohmic contacts to monolayer MoS, particularly at low carrier densities. In this work, we report a new contact scheme that utilizes cobalt (Co) with a monolayer of hexagonal boron nitride (h-BN) that has the following two functions: modifies the work function of Co and acts as a tunneling barrier. We measure a flat-band Schottky barrier of 16 meV, which makes thin tunnel barriers upon doping the channels, and thus achieve low-T contact resistance of 3 kΩ.μm at a carrier density of 5.3 × 10/cm. This further allows us to observe Shubnikov-de Haas oscillations in monolayer MoS at much lower carrier densities compared to previous work.
单层 MoS,以及许多其他过渡金属二卤化物,由于其超薄的性质、灵活性、较大的带隙和独特的自旋 - 谷耦合物理特性,在纳米电子学和光电子学领域具有广阔的应用前景。然而,由于无法实现低温下的欧姆接触到单层 MoS,特别是在低载流子密度下,对这些特性的低温下的仔细研究受到了阻碍。在这项工作中,我们报告了一种新的接触方案,该方案利用钴(Co)与单层六方氮化硼(h-BN)结合使用,具有以下两个功能:修饰 Co 的功函数并充当隧道势垒。我们测量得到了 16meV 的平带肖特基势垒,这使得在掺杂沟道时形成了薄的隧道势垒,从而实现了在载流子密度为 5.3×10/cm 时低至 3kΩ.μm 的低 T 接触电阻。这使得我们能够在比以前的工作低得多的载流子密度下观察到单层 MoS 的肖特基 - 德哈斯振荡。