氧化锌/硫化铜/氧化锌多层薄膜：结构优化及其在光电和光催化性能应用方面的详细数据

ZnO/Cu₂S/ZnO Multilayer Films: Structure Optimization and Its Detail Data for Applications on Photoelectric and Photocatalytic Properties.

作者信息

Wang Zhenxing, Xu Feng, Wang He, Cui Hai-Ning, Wang Haishui

机构信息

Department of Optical Information Science and Technology, College of Physics and College of Zhaoqing, Jilin University, Zhaoqing 526061, China.

Department of Optical Information Science and Technology, College of Electronic Science and Engineering, Jilin University, Changchun 130021, China.

出版信息

Materials (Basel). 2017 Jan 5;10(1):37. doi: 10.3390/ma10010037.

DOI:10.3390/ma10010037

PMID:28772398

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5344558/

Abstract

Monolayer Cu₂S and ZnO, and three kinds of complex films, Cu₂S/ZnO, ZnO/Cu₂S, and ZnO/Cu₂S/ZnO, were deposited on glass substrates by means of radio frequency (RF) magnetron sputtering device. The impact of the thickness of ZnO and Cu₂S on the whole transmittance, conductivity, and photocatalysis was investigated. The optical and electrical properties of the multilayer were studied by optical spectrometry and four point probes. Numerical simulation of the optical transmittance of the multilayer films has been carried out in order to guide the experimental work. The comprehensive performances of the multilayers as transparent conductive coatings were compared using the figure of merit. Compared with monolithic Cu₂S and ZnO films, both the optical transmission property and photocatalytic performance of complex films such as Cu₂S/ZnO and ZnO/Cu₂S/ZnO change significantly.

摘要

通过射频（RF）磁控溅射装置在玻璃基板上沉积了单层Cu₂S和ZnO以及三种复合薄膜，即Cu₂S/ZnO、ZnO/Cu₂S和ZnO/Cu₂S/ZnO。研究了ZnO和Cu₂S的厚度对整体透光率、电导率和光催化性能的影响。通过光谱法和四点探针研究了多层膜的光学和电学性质。为了指导实验工作，对多层膜的光学透过率进行了数值模拟。使用品质因数比较了多层膜作为透明导电涂层的综合性能。与单片Cu₂S和ZnO薄膜相比，Cu₂S/ZnO和ZnO/Cu₂S/ZnO等复合薄膜的光学传输性能和光催化性能均发生了显著变化。