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在用于光子器件的三维六方 GaN 结构中形成 a 面晶面。

Formation of a-plane facets in three-dimensional hexagonal GaN structures for photonic devices.

机构信息

Department of Physics, Korea Advanced Institute of Science and Technology, Daejeon, 34141, Republic of Korea.

Department of Physics, Chemistry, and Biology (IFM), Semiconductor Materials, Linköping University, SE-58183, Linköping, Sweden.

出版信息

Sci Rep. 2017 Aug 24;7(1):9356. doi: 10.1038/s41598-017-09782-1.

Abstract

Control of the growth front in three-dimensional (3D) hexagonal GaN core structures is crucial for increased performance of light-emitting diodes (LEDs), and other photonic devices. This is due to the fact that InGaN layers formed on different growth facets in 3D structures exhibit various band gaps which originate from differences in the indium-incorporation efficiency, internal polarization, and growth rate. Here, a-plane {[Formula: see text] } facets, which are rarely formed in hexagonal pyramid based growth, are intentionally fabricated using mask patterns and adjustment of the core growth conditions. Moreover, the growth area covered by these facets is modified by changing the growth time. The origin of the formation of a-plane {[Formula: see text]} facets is also discussed. Furthermore, due to a growth condition transition from a 3D core structure to an InGaN multi-quantum well, a growth front transformation (i.e., a transformation of a-plane {[Formula: see text]} facets to semi-polar {[Formula: see text]} facets) is directly observed. Based on our understanding and control of this novel growth mechanism, we can achieve efficient broadband LEDs or photovoltaic cells.

摘要

控制三维(3D)六方 GaN 核结构中的生长前沿对于提高发光二极管(LED)和其他光子器件的性能至关重要。这是因为在 3D 结构中不同生长面上形成的 InGaN 层表现出不同的能带隙,这源于铟掺入效率、内部极化和生长速率的差异。在这里,使用掩模图案和调整核生长条件,有意地制造了很少在六方金字塔生长中形成的 a 面 {[公式:见文本]}面。此外,通过改变生长时间来改变这些面覆盖的生长区域。还讨论了 a 面 {[公式:见文本]}面形成的起源。此外,由于从 3D 核结构到 InGaN 多量子阱的生长条件的转变,直接观察到生长前沿的转变(即 a 面 {[公式:见文本]}面到半极性 {[公式:见文本]}面的转变)。基于我们对这种新的生长机制的理解和控制,我们可以实现高效的宽带 LED 或光伏电池。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/59ba/5571163/e1b9e32d7b3c/41598_2017_9782_Fig1_HTML.jpg

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