Center for Nanoparticle Research, Institute for Basic Science (IBS), Seoul, 08826, Republic of Korea.
School of Chemical and Biological Engineering, Institute of Chemical Processes, Seoul National University (SNU), Seoul, 08826, Republic of Korea.
Adv Mater. 2017 Oct;29(40). doi: 10.1002/adma.201702902. Epub 2017 Aug 28.
Inorganic-organic hybrid perovskite thin films have attracted significant attention as an alternative to silicon in photon-absorbing devices mainly because of their superb optoelectronic properties. However, high-definition patterning of perovskite thin films, which is important for fabrication of the image sensor array, is hardly accomplished owing to their extreme instability in general photolithographic solvents. Here, a novel patterning process for perovskite thin films is described: the high-resolution spin-on-patterning (SoP) process. This fast and facile process is compatible with a variety of spin-coated perovskite materials and perovskite deposition techniques. The SoP process is successfully applied to develop a high-performance, ultrathin, and deformable perovskite-on-silicon multiplexed image sensor array, paving the road toward next-generation image sensor arrays.
无机-有机杂化钙钛矿薄膜作为光子吸收器件中硅的替代品引起了极大的关注，主要是因为它们具有卓越的光电性能。然而，由于它们在一般光刻溶剂中的极端不稳定性，对于图像传感器阵列的制造来说，高质量的钙钛矿薄膜图案化非常困难。在这里，描述了一种钙钛矿薄膜的新型图案化工艺：高分辨率旋涂图案化（SoP）工艺。这种快速简便的工艺与各种旋涂钙钛矿材料和钙钛矿沉积技术兼容。SoP 工艺成功地应用于开发高性能、超薄且可变形的钙钛矿-硅复合式多路图像传感器阵列，为下一代图像传感器阵列铺平了道路。
